Crossmark

Development of rotary-type electrostatic motor for MEMS microrobot

Crossref DOI link: https://doi.org/10.1007/s10015-024-00996-x

Published Online: 2024-12-24

Published Print: 2025-02

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Lyu, Shuxin

Tamaki, Yuya

Morishita, Katsuyuki

Saito, Ken
License Information

Text and Data Mining valid from 2024-12-24

Version of Record valid from 2024-12-24
More Information

Article History

Received: 14 May 2024

Accepted: 18 November 2024

First Online: 24 December 2024