Orthogonal experiment and analysis of power spectral density on process parameters of pitch tool polishing
Crossref DOI link: https://doi.org/10.1007/s10043-016-0281-z
Published Online: 2016-11-21
Published Print: 2017-02
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Meng, Kai
Wan, Yongjian
Wu, Fan
Shen, Lijun
Wu, Hsing-Yu
Funding for this research was provided by:
China Scholarship Council (201404910368)
National Natural Science Foundation of China (61378054)
License valid from 2016-11-21