Imaging ellipsometry measurement noises associated with non-uniform retardation of the compensator
Crossref DOI link: https://doi.org/10.1007/s10043-019-00569-5
Published Online: 2019-11-19
Published Print: 2020-02
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Jin, Lianhua http://orcid.org/0000-0002-0202-6605
Iizuka, Yuki
Kondoh, Eiichi
Uehara, Makoto
Gelloz, Bernard
Text and Data Mining valid from 2019-11-19
Version of Record valid from 2019-11-19
Article History
Received: 1 March 2019
Accepted: 7 November 2019
First Online: 19 November 2019