Crossmark

Establishment of method distinguishing between defects and artificial texture in defect inspection with phase-shift illumination method

Published Online: 2023-08-05

Published Print: 2023-10

Authors

Onishi, Yoshito

Seo, Yoshiho

Matsuoka, Masaoki

Serikawa, Shigeru

Tsugane, Ken
License Information

Text and Data Mining valid from 2023-08-05

Version of Record valid from 2023-08-05
More Information

Article History

Received: 31 March 2023

Accepted: 22 July 2023

First Online: 5 August 2023

Declarations

:

: On behalf of all authors, the corresponding author states that there is no conflict of interest.

Document is current