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Optical, chemical and coverage properties of magnesium fluoride formed by atomic layer deposition

Published Online: 2024-03-02

Published Print: 2024-04

Authors

Sugai, Yuma https://orcid.org/0009-0002-8193-3699
Sugata, Hironori

Sugawara, Takuya

Muhammad, Safdar

Hämäläinen, Jani

Lamminmäki, Nina

Kostamo, Juhana
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Text and Data Mining valid from 2024-03-02

Version of Record valid from 2024-03-02
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Article History

Received: 17 October 2023

Accepted: 18 January 2024

First Online: 2 March 2024

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