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Through-focus scanning re-radiance simulation for semiconductor inspection system development

Published Online: 2025-03-19

Published Print: 2025-04

Authors

Jeong, Byeongjoon

Choi, Heejoo

Kim, Daewook

Kim, Youngsik https://orcid.org/0000-0003-3791-6453
Funding

Funding for this research was provided by:

Ministry of Trade, Industry and Energy (2001710)
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Text and Data Mining valid from 2025-03-19

Version of Record valid from 2025-03-19
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Article History

Received: 5 December 2024

Accepted: 18 February 2025

First Online: 19 March 2025

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