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Digitally directed beams for microscale inspection

Crossref DOI link: https://doi.org/10.1007/s10043-025-00965-0

Published Online: 2025-04-24

Published Print: 2025-04

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Ohno, Hiroshi https://orcid.org/0000-0002-8267-6156
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Text and Data Mining valid from 2025-04-01

Version of Record valid from 2025-04-24
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Article History

Received: 8 November 2024

Accepted: 8 March 2025

First Online: 24 April 2025

Declarations

:

: The authors declare no conflicts of interest.