Evaluating the reliability level of virtual metrology results for flexible process control: a novelty detection-based approach
Crossref DOI link: https://doi.org/10.1007/s10044-014-0386-6
Published Online: 2014-06-26
Published Print: 2014-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kang, Pilsung
Kim, Dongil
Cho, Sungzoon
Text and Data Mining valid from 2014-06-26