PEN/BADCy Interlayer Dielectric Films with Tunable Microstructures via an Assist of Temperature for Enhanced Frequency Stability
Crossref DOI link: https://doi.org/10.1007/s10118-020-2417-7
Published Online: 2020-05-18
Published Print: 2020-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Lei, Xi-Ting
Tong, Li-Fen
Xu, Ming-Zhen
You, Yong
Liu, Xiao-Bo
Text and Data Mining valid from 2020-05-18
Version of Record valid from 2020-05-18
Article History
Received: 10 February 2020
Accepted: 4 March 2020
First Online: 18 May 2020