A general metrology of stress on crystalline silicon with random crystal plane by using micro-Raman spectroscopy
Crossref DOI link: https://doi.org/10.1007/s10409-018-0797-5
Published Online: 2018-09-21
Published Print: 2018-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Qiu, Wei
Ma, Lulu
Li, Qiu
Xing, Huadan
Cheng, Cuili
Huang, Ganyun
Text and Data Mining valid from 2018-09-21
Article History
Received: 17 April 2018
Revised: 26 May 2018
Accepted: 12 June 2018
First Online: 21 September 2018