Nanomechanical and nanotribological characterization of a MEMS micromembrane supported by two folded hinges
Crossref DOI link: https://doi.org/10.1007/s10470-014-0482-y
Published Online: 2015-01-07
Published Print: 2015-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Pustan, Marius
Dudescu, Cristian
Birleanu, Corina
Text and Data Mining valid from 2015-01-07
