Analysis of damping optimization through perforations in proof-mass of SOI capacitive accelerometer
Crossref DOI link: https://doi.org/10.1007/s10470-019-01560-5
Published Online: 2019-11-21
Published Print: 2020-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kalaiselvi, S. http://orcid.org/0000-0002-9321-1039
Sujatha, L.
Sundar, R.
Funding for this research was provided by:
Defence Research and Development Organisation (GTRE/GATET/SM02/1516/088/16/01)
Text and Data Mining valid from 2019-11-21
Version of Record valid from 2019-11-21
Article History
Received: 15 July 2019
Revised: 24 October 2019
Accepted: 11 November 2019
First Online: 21 November 2019