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Convolutional neural network based multi-input multi-output model for multi-sensor multivariate virtual metrology in semiconductor manufacturing

Crossref DOI link: https://doi.org/10.1007/s10479-024-05902-z

Published Online: 2024-03-16

Published Print: 2024-08

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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