Funding for this research was provided by:
National Natural Science Foundation of China (72401232)
Article History
Accepted: 18 March 2025
First Online: 29 March 2025
Declarations
:
: We have no affiliations with or involvement in any organization or entity with any financial interest or non-financial interest in the subject matter or materials discussed in this manuscript.
: We the undersigned declare that this manuscript entitled “COFA: Counterfactual Attention Framework for Trustworthy Wafer Map Failure Classification” is original, has not been published before, and is not currently being considered for publication elsewhere. We confirm that the manuscript has been read and approved by all named authors and that there are no other persons who satisfied the criteria for authorship but are not listed. We further confirm that the order of authors listed in the manuscript has been approved by all of us. We understand that the Corresponding Author is the sole contact for the Editorial process. She is responsible for communicating with the other authors about progress, submissions of revisions, and final approval of proofs. Signed by all authors as follows: Kaiyue Feng, Jia Wang, Chenke Yin, and Andong Li. The corresponding author is Jia Wang and her email address is jia.wang02@xjtlu.edu.cn.
: We would like to be considered for publication in Applied Intelligence. No conflict of interest exists in the submission of this manuscript, and the manuscript is approved by all authors for publication. We declare the work described was original research that has not been published previously and is not under consideration for publication elsewhere, in whole or in part. All the authors listed have approved the manuscript that is enclosed. We hope this paper is suitable for Applied Intelligence. If have any queries, please don’t hesitate to contact the corresponding author Jia Wang.
: Not applicable.