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An intelligent MIMO run-to-run controller for semiconductor manufacturing processes based on an enhanced twin-delayed deep deterministic policy gradient algorithm

Crossref DOI link: https://doi.org/10.1007/s10489-025-06615-x

Published Online: 2025-05-09

Published Print: 2025-07

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Ma, Zhu

Chen, Yonglin

Pan, Tianhong https://orcid.org/0000-0002-0993-3937
Funding

Funding for this research was provided by:

National Natural Science Foundation of China (62273002, 61873113)

Major Scientific Research Project of Universities in Anhui Province (2024AH040039)
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Text and Data Mining valid from 2025-05-09

Version of Record valid from 2025-05-09
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Article History

Accepted: 4 May 2025

First Online: 9 May 2025

Declarations

:

: The authors declare that they have no known competing financial interests or personal relationships that could have appeared to influence the work reported in this manuscript.

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