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Storage prioritization by redistributing wafer lot transfers to enhance real-world fab throughput

Published Online: 2022-05-26

Published Print: 2023-09

Authors

Kim, Haejoong

Park, Jeehyuk

Lee, Jongsung https://orcid.org/0000-0001-6013-4535
Funding

Funding for this research was provided by:

National Research Foundation of Korea (No.2019R1G1A1011098)
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Text and Data Mining valid from 2022-05-26

Version of Record valid from 2022-05-26
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Article History

Accepted: 20 March 2022

First Online: 26 May 2022

Document is current