Formation of the Crystalline Structure of a Silicon Surface in Active Media During Polishing
Crossref DOI link: https://doi.org/10.1007/s10717-014-9644-8
Published Online: 2014-09-21
Published Print: 2014-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kanaev, A. A.
Gorodetskii, A. E.
Text and Data Mining valid from 2014-09-01