Surface Protection of Low-Melting Glass Based Silicon Substrates for Silicon Transistor Fabrication
Crossref DOI link: https://doi.org/10.1007/s10717-017-9954-8
Published Online: 2017-09-08
Published Print: 2017-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Ismailov, T. A.
Sarkarov, T. É.
Shangereeva, B. A.
Shakhmaeva, A. R.
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