Method of Processing Quartz Accessories in the Manufacturing of the Structures of Micro- and Nanoelectronics
Crossref DOI link: https://doi.org/10.1007/s10717-019-00118-1
Published Online: 2019-03-21
Published Print: 2019-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Ismailov, T. A.
Sarkarov, T. É.
Shakhmaeva, A. R.
Shangereeva, B. A.
Text and Data Mining valid from 2019-03-01
Article History
First Online: 21 March 2019