Fabrication and Analysis of Three-Layer All-Silicon Interference Optical Filter with Sub-Wavelength Structure toward High Performance Terahertz Optics
Crossref DOI link: https://doi.org/10.1007/s10762-016-0328-z
Published Online: 2016-10-28
Published Print: 2017-02
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Makitsubo, Hironobu
Wada, Takehiko
Kataza, Hirokazu
Mita, Makoto
Suzuki, Toyoaki
Yamamoto, Keita
License valid from 2016-10-28