Photocarrier Radiometry Characterization of Ultra-shallow Junctions (USJ) in Silicon with Excimer Laser Irradiation
Crossref DOI link: https://doi.org/10.1007/s10765-014-1602-8
Published Online: 2014-04-18
Published Print: 2015-06
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Wang, Qian
Li, Bincheng
Ren, Shengdong
Wang, Qiang
Text and Data Mining valid from 2014-04-18
