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Roles and mechanistic analysis of adenine as a green inhibitor in chemical mechanical polishing

Published Online: 2021-06-18

Published Print: 2021-10

Authors

Zeng, Nengyuan

Zhao, Hongdong

Luo, Chong

Liu, Yuling

Wang, Chenwei

Ma, Tengda

Wang, Wantang
Funding

Funding for this research was provided by:

National Major Science and Technology Projects of China (2016ZX02301003-004-007, 2016ZX02301003-004-007)
License Information

Text and Data Mining valid from 2021-06-18

Version of Record valid from 2021-06-18
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Article History

Received: 20 March 2021

Accepted: 31 May 2021

First Online: 18 June 2021

Document is current