Spectral Ellipsometry Study of Silicon Surfaces Implanted with Oxygen and Helium Ions
Crossref DOI link: https://doi.org/10.1007/s10812-019-00793-6
Published Online: 2019-04-05
Published Print: 2019-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Bazarov, V. V.
Nuzhdin, V. I.
Valeev, V. F.
Lyadov, N. M.
Text and Data Mining valid from 2019-03-01
Article History
Received: 26 June 2018
First Online: 5 April 2019