Frustrated Total Internal Reflection Spectra of Diazoquinone–Novolac Photoresist Films
Crossref DOI link: https://doi.org/10.1007/s10812-021-01111-9
Published Online: 2021-01-28
Published Print: 2021-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Brinkevich, S. D.
Brinkevich, D. I.
Prosolovich, V. S.
Lastovskii, S. B.
Pyatlitski, A. N.
Text and Data Mining valid from 2021-01-01
Version of Record valid from 2021-01-01
Article History
Received: 18 August 2020
First Online: 28 January 2021