Optical Emission Analysis of Atmospheric Pressure Methane Plasma Chemical Vapor Deposition
Crossref DOI link: https://doi.org/10.1007/s10812-021-01281-6
Published Online: 2021-11-03
Published Print: 2021-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Chang, Y.-C.
Wu, P.-Y.
Jhuang, J.-C.
Huang, C.
Text and Data Mining valid from 2021-11-01
Version of Record valid from 2021-11-01
Article History
First Online: 3 November 2021