Fourier-IR Spectroscopy of Photoresist/Silicon Structures for Explosive Lithography
Crossref DOI link: https://doi.org/10.1007/s10812-024-01657-4
Published Online: 2024-01-05
Published Print: 2024-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Brinkevich, D. I.
Grinyuk, E. V.
Brinkevich, S. D.
Prosolovich, V. S.
Kolos, V. V.
Zubova, O. A.
Lastovskii, S. B.
Text and Data Mining valid from 2024-01-01
Version of Record valid from 2024-01-01
Article History
Received: 14 July 2023
First Online: 5 January 2024