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IR-Fourier Spectroscopy of Attenuated Total Internal Reflection of Polyimide Films on Single-Crystal Silicon Wafers

Published Online: 2024-05-10

Published Print: 2024-05

Authors

Prosolovich, V. S.

Brinkevich, D. I.

Grinyuk, E. V.

Brinkevich, S. D.

Kolos, V. V.

Zubova, O. A.

Lastovskii, S. B.
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Text and Data Mining valid from 2024-05-01

Version of Record valid from 2024-05-01
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Article History

Received: 2 October 2023

First Online: 10 May 2024

Document is current