Investigation of the influence of double-sided diaphragm on performance of capacitance and sensitivity of touch mode capacitive pressure sensor: numerical modeling and simulation forecasting
Crossref DOI link: https://doi.org/10.1007/s10825-017-1033-4
Published Online: 2017-07-14
Published Print: 2017-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Varma, M. Aditya
Thukral, Deepali
Jindal, Sumit Kumar
License valid from 2017-07-14