Analytical modeling and simulation of MEMS piezoresistive pressure sensors with a square silicon carbide diaphragm as the primary sensing element under different loading conditions
Crossref DOI link: https://doi.org/10.1007/s10825-018-1223-8
Published Online: 2018-07-30
Published Print: 2018-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Jindal, Sumit Kumar
Magam, Sai Pratyusha
Shaklya, Maitreyi
Text and Data Mining valid from 2018-07-30
Article History
First Online: 30 July 2018