A source/drain-on-insulator structure to improve the performance of stacked nanosheet field-effect transistors
Crossref DOI link: https://doi.org/10.1007/s10825-020-01502-9
Published Online: 2020-04-25
Published Print: 2020-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Jegadheesan, V.
Sivasankaran, K.
Funding for this research was provided by:
Council of Scientific and Industrial Research, India (09/844/(0082)/2019-EMR-I.)
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Article History
First Online: 25 April 2020