Improvement of RF MEMS devices by spring constant scaling laws
Crossref DOI link: https://doi.org/10.1007/s10825-021-01657-z
Published Online: 2021-02-02
Published Print: 2021-04
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Bansal, Deepak http://orcid.org/0000-0001-6456-9931
Kumar, Prem
Kumar, Amit
Text and Data Mining valid from 2021-02-02
Version of Record valid from 2021-02-02
Article History
Received: 23 July 2020
Accepted: 9 January 2021
First Online: 2 February 2021
Compliance with ethical standards
:
: Authors declare no conflict of interest.