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Design and analysis of a MEMS pressure sensor with a bossed membrane and ancillary bi-functional frog arm structure for low pressure measurement

Crossref DOI link: https://doi.org/10.1007/s10825-021-01660-4

Published Online: 2021-02-24

Published Print: 2021-04

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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