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Development of algorithms in open-source Elmer FEM for frequency response and biased modal analysis of MEMS cantilever

Crossref DOI link: https://doi.org/10.1007/s10825-021-01672-0

Published Online: 2021-03-19

Published Print: 2021-04

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Tez, Serdar https://orcid.org/0000-0003-3962-7284
Kaya, Mehmet https://orcid.org/0000-0002-4953-7138
License Information

Text and Data Mining valid from 2021-03-19

Version of Record valid from 2021-03-19
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Article History

Received: 25 August 2020

Accepted: 6 February 2021

First Online: 19 March 2021

Compliance with ethical standards

:

: The authors have no conflicts of interest to declare.