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The design and simulation of a MOSFET-based MEMS pressure sensor using an integrated simulation approach

Published Online: 2021-03-20

Published Print: 2021-06

Authors

Wolde, Workneh https://orcid.org/0000-0001-5051-2547
Gupta, Pallavi
License Information

Text and Data Mining valid from 2021-03-20

Version of Record valid from 2021-03-20
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Article History

Received: 25 February 2020

Accepted: 22 February 2021

First Online: 20 March 2021

Declarations

:

: The authors declare that they have no conflicts of interest.

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