Characterization of RF sputtered zinc oxide thin films on silicon using scanning acoustic microscopy
Crossref DOI link: https://doi.org/10.1007/s10832-017-0105-y
Published Online: 2017-10-15
Published Print: 2018-04
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kim, Miso http://orcid.org/0000-0002-2323-4892
Choi, Namkyoung
Kim, Yong-Il
Lee, Yun-hee
Funding for this research was provided by:
National Research Foundation of Korea (NRF-2013M2A2A9043274)
License valid from 2017-10-15