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Design and Optimization Methodology of Coplanar Waveguide Test Structures for Dielectric Characterization of Thin Films

Published Online: 2020-03-30

Published Print: 2020-04

Authors

Ge, Jinqun https://orcid.org/0000-0003-3440-1964
Xia, Tian

Wang, Guoan
Funding

Funding for this research was provided by:

National Science Foundation (1508139)
License Information

Text and Data Mining valid from 2020-03-30

Version of Record valid from 2020-03-30
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Article History

Received: 29 July 2019

Accepted: 17 March 2020

First Online: 30 March 2020

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