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A Defect Detection Method of Mixed Wafer Map Using Neighborhood Path Filtering Clustering Algorithm

Published Online: 2024-10-02

Published Print: 2024-08

Authors

Hou, Xingna

Qin, Guanxiang

Lu, Ying

Yi, Mulan

Chen, Shouhong http://orcid.org/0000-0002-4910-2978
Funding

Funding for this research was provided by:

Natural Science Foundation of Guangxi Zhuang Autonomous Region (2018GXNSFBA281175)

Guangxi Key Laboratory of Automation Test and Instrumentation (No. YQ22102)

the National Natural Science Foundation of China (No. 61661013)

Innovation Project of GUET Graduate Education (No. 2020YCXS095, No. 2022YCXS162, No. 2024YCXS123)

the Basic Ability Enhancement Program for Young and Middle-aged Teachers of Guangxi (No. 2022KY0197)
License Information

Text and Data Mining valid from 2024-08-01

Version of Record valid from 2024-08-01
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Article History

Received: 13 October 2023

Accepted: 4 August 2024

First Online: 2 October 2024

Declarations

:

: The authors declare that they have no known competing financial interests or personal relationships that could have appeared to influence the work reported in this paper.

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