Crossmark

Nonstationary signal analysis and support vector machine based classification for vibration based characterization and monitoring of slit valves in semiconductor manufacturing

Crossref DOI link: https://doi.org/10.1007/s10845-017-1308-4

Published Online: 2017-02-22

Published Print: 2019-03

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Musselman, M.

Xie, H.

Djurdjanovic, D. https://orcid.org/0000-0002-9080-818X
Funding

Funding for this research was provided by:

Division of Industrial Innovation and Partnerships (IIP 1266279)
License Information

Text and Data Mining valid from 2017-02-22

Version of Record valid from 2017-02-22
More Information

Article History

Received: 22 July 2016

Accepted: 7 February 2017

First Online: 22 February 2017

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