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Joint modeling of classification and regression for improving faulty wafer detection in semiconductor manufacturing

Published Online: 2018-10-04

Published Print: 2020-02

Authors

Kang, Seokho https://orcid.org/0000-0002-0960-0294
Funding

Funding for this research was provided by:

National Research Foundation of Korea (NRF-2017R1C1B5075685)
License Information

Text and Data Mining valid from 2018-10-04
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Article History

Received: 6 July 2018

Accepted: 30 September 2018

First Online: 4 October 2018

Document is current