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Multiple time-series convolutional neural network for fault detection and diagnosis and empirical study in semiconductor manufacturing

Published Online: 2020-05-18

Published Print: 2021-03

Authors

Hsu, Chia-Yu http://orcid.org/0000-0002-2939-4387
Liu, Wei-Chen
Funding

Funding for this research was provided by:

Ministry of Science and Technology, Taiwan (MOST 107-2221-E-027-127-MY2, MOST 108-2745-8-027-003)
License Information

Text and Data Mining valid from 2020-05-18

Version of Record valid from 2020-05-18
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Article History

Received: 22 January 2020

Accepted: 14 May 2020

First Online: 18 May 2020

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