A sequential resampling approach for imbalanced batch process fault detection in semiconductor manufacturing
Crossref DOI link: https://doi.org/10.1007/s10845-020-01716-5
Published Online: 2020-11-23
Published Print: 2022-04
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Zhang, Yi
Peng, Peng
Liu, Chongdang
Xu, Yanyan
Zhang, Heming
Text and Data Mining valid from 2020-11-23
Version of Record valid from 2020-11-23
Article History
Received: 25 March 2020
Accepted: 12 November 2020
First Online: 23 November 2020