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A chip inspection system based on a multiscale subarea attention network

Published Online: 2024-06-23

Published Print: 2025-08

Authors

Hou, Yun

Fan, Hong

Chen, Ying

Liu, Guangshuai https://orcid.org/0009-0007-4694-0822
Funding

Funding for this research was provided by:

Sichuan Science and Technology Program (2023NSFSC0497)

Sichuan Science and Technology Program (2023YFG0056)

National Key Research and Development Program (2023YFB4707200)

National Natural Science Foundation of China (52175031)
License Information

Text and Data Mining valid from 2024-06-23

Version of Record valid from 2024-06-23
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Article History

Received: 11 December 2023

Accepted: 30 May 2024

First Online: 23 June 2024

Declarations

:

: The authors declare that they have no conflict of interest.

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