Mechanical properties of amorphous silicon carbonitride thin films at elevated temperatures
Crossref DOI link: https://doi.org/10.1007/s10853-014-8715-0
Published Online: 2014-11-21
Published Print: 2015-02
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Ctvrtlik, Radim
Al-Haik, Marwan S.
Kulikovsky, Valeriy
Text and Data Mining valid from 2014-11-21