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The effects of thermal nitridation on phosphorus diffusion in strained SiGe and SiGe:C

Crossref DOI link: https://doi.org/10.1007/s10853-015-9475-1

Published Online: 2015-10-13

Published Print: 2016-02

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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