Revealing two components of oxidant flux for thermal oxidation of silicon contrary to several models
Crossref DOI link: https://doi.org/10.1007/s10853-016-0343-4
Published Online: 2016-09-01
Published Print: 2017-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Saad, A. M.
Malyutina-Bronskaya, V. https://orcid.org/0000-0003-2788-4945
Zalesski, V.
Maser, K.
License valid from 2016-09-01
