Monodispersed mesoporous silica (mSiO2) spheres as abrasives for improved chemical mechanical planarization performance
Crossref DOI link: https://doi.org/10.1007/s10853-016-9882-y
Published Online: 2016-03-11
Published Print: 2016-06
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Chen, Yang
Li, Zefeng
Qin, Jiawei
Chen, Ailian
Text and Data Mining valid from 2016-03-11
