Crossmark

Atomic/molecular layer deposition of hybrid inorganic–organic thin films from erbium guanidinate precursor

Crossref DOI link: https://doi.org/10.1007/s10853-017-0855-6

Published Online: 2017-02-10

Published Print: 2017-06

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Mai, Lukas http://orcid.org/0000-0001-8949-0736
Giedraityte, Zivile

Schmidt, Marcel

Rogalla, Detlef

Scholz, Sven

Wieck, Andreas D. http://orcid.org/0000-0001-9776-2922
Devi, Anjana http://orcid.org/0000-0003-2142-8105
Karppinen, Maarit
Funding

Funding for this research was provided by:

European Research Council (339478)

Deutsche Forschungsgemeinschaft (DFG-SFT-TR 87)

European Cooperation in Science and Technology (HERALD)
License Information

License valid from 2017-02-10