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Annealing of silicon carbonitride nanostructured thin films: interdependency of hydrogen content, optical, and structural properties

Published Online: 2017-10-03

Published Print: 2018-01

Authors

Khatami, Z. https://orcid.org/0000-0001-9371-3429
Nowikow, C.

Wojcik, J.

Mascher, P.
Funding

Funding for this research was provided by:

Canadian Network for Research and Innovation in Machining Technology, Natural Sciences and Engineering Research Council of Canada
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License valid from 2017-10-03

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