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Preparation of non-spherical silica composite abrasives by lanthanum ion-induced effect and its chemical–mechanical polishing properties on sapphire substrates

Crossref DOI link: https://doi.org/10.1007/s10853-018-2357-6

Published Online: 2018-04-25

Published Print: 2018-08

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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