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Superior-performance TiN films sputtered for capacitor electrodes

Crossref DOI link: https://doi.org/10.1007/s10853-019-03652-z

Published Online: 2019-04-25

Published Print: 2019-07

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Sun, Nana

Zhou, Dayu https://orcid.org/0000-0001-5143-9230
Shi, Shuyan

Liu, Feng

Liu, Wenwen

Chen, Qilei

Zhao, Peng

Li, Shuaidong

Wang, Jingjing
Funding

Funding for this research was provided by:

National Natural Science Foundation of China (NSFC 51672032, NSFC 51272034)

Fundamental Research Funds for the Central Universities of China (No. DUT17ZD211)
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Article History

Received: 8 December 2018

Accepted: 19 April 2019

First Online: 25 April 2019